Originally Posted by
Phyrexii
Your machine could be over (or under) compensating for backlash - put an indicator on your part, and manually move it with your handwheel a tenth (.0001), then move it back. If it is overcompensating, there will be a jump on the indicator. Under compensating would result in no movement. Fixing that is just a simple parameter change (although I don't know which one).
Also, it may be possible that you are somehow in exact stop mode? If so, the machine will pause briefly between execution of each block, and it may leave a dwell mark. I don't know how to change that offhand on a FANUC machine, I know on my FADAL I turn it off with a G08.
And, lastly, if you don't want to overlap your start and end points, as suggested, you can start and end on a corner, where a bump will not show up.