I want to keep clearance height, so I'd avoid a G0 between drillings and use G98. That makes an extra move but it's a rapid , so doesn't cost much.

G0 Z5 (CLEAR CLAMPS)
S2000M3
G98
G81 Z-0.875 R0.1 F20 (Rapid to 0.1, drill pilot, G98 RETRACTS TO PREV Z : 5)
G83 Z-5.1 R-0.5 Q0.75 (WHEN DONE, RETRACTS TO PREV Z : 5)
G80

That seems to do what I want.

thanks for your suggestions, it helps me know I'm not missing some obvious move in one command.